AZO Sputtering Targets

AZO Sputtering Targets

Formula： Al2O3: ZnO = 2:98
Application

AZO rotating/plane target

For optical coating, vacuum coating, sputtering target material, magnetic film, electronic material, alloy material, etc.

Name

AZO rotating/plane target

Component (wt%)

Al2O3: ZnO = 2:98

Purity

3N5,4N

Density

≥5.56 (g /cm3)

Relative density:

≥99.3%

Resistivity

≤ 3x10 - 3 Ω.Cm

OD

φ 150-160mm

Steel pipe diameter

OD133mm / ID125mm

Length

≤4m

According to the requirements of the drawing

Size

Φ100*40mm x 3m or customized

Density

8.92g/cm3

Melting point

1083℃

Evaporating Temp

1017℃
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