ITO Sputtering Targets

Item

Standard

Components

In₂O₃:SnO₂=90:10(wt%), or to customer requirements

Purity

4N

Relative density

≥99.3% (theoretical:7.15g/cm³⁾

Resistivity

≤1.8Ω·mm²/m

Oxygen bleeding rate

≤0.5%

Appearance

Flakes or other shapes

color is uniform; smooth surface, without cracks, edges and corners, and without

any foreign inclusions and pollutants

Internal

no crack or foreign matter inside